| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method capable of inspecting with high reliability, reducing a ratio of a pseudo defect, and improving convenience of inspection.SOLUTION: An inspection device 100 comprises: a table 101 for mounting a mask Ma thereon; an imaging part 104 for imaging an area to be inspected of the mask Ma for every stripe, for creating optical image data; a reference image creation part 116 for performing filter processing to the image data created from design data, for creating reference image data; a reference image creation function calculation part 115 for determining a function of the filter processing; a comparison part 117 for comparing optical frame data and reference frame data, for counting a number of defects for every stripe; and a defect analysis part 118 for, analyzing a factor of occurrence of many defects on the stripe in which a number of detected defects exceeds a permission value, by using defect information output from the comparison part 117.SELECTED DRAWING: Figure 1 |
