IMAGE MEASURING METHOD AND IMAGE MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an image measuring method and an image measuring device for detecting the edge of a specimen in a short time without reducing the accuracy in detection.SOLUTION: There is provided an image measuring method for photographing a specimen and calculating the shape of the specimen on the basis of an image of the specimen, the method comprising: a height measuring step S101 of measuring the heights of the specimen at a plurality of places; a calculation step S102 of calculating the positions of a plurality of planes on the specimen on the basis of the heights measured in the height measuring step S101; an imaging step S104 of sequentially focusing the positions of the plurality of planes calculated in the calculation step S102 to photograph the specimen; and a calculation step S105 of calculating the shape of the specimen on the basis of the image of the specimen photographed in the imaging step S104.SELECTED DRAWING: Figure 2