| 摘要 |
PROBLEM TO BE SOLVED: To provide an internal temperature measuring device that can accurately measure (determine) the internal temperature of a measurement object, using a MEMS chip with a thermo-pile.SOLUTION: An internal temperature measuring device is designed to estimate a difference in temperature measured by a thermo-pile 24a when a heat flow Ia alone which adversely affects the accuracy of measuring the internal temperature of a measurement object has entered a top surface part 21 of a MEMS chip and determine the heat-resistance Rx of the measurement object, using the estimation result.SELECTED DRAWING: Figure 6 |
