| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing device in which at least one of the facilitation of opening/closing of a cassette cover and the enhancement of safety of an operator can be achieved.SOLUTION: Cassette mounting means 70A, 70B on which a cassette housing a plurality of workpieces are mounted include cassette tables 12, 14 on the upper surface of which cassettes 11, 13 are mounted, cassette covers 71A, 71B for closing the cassettes 11, 13, lifting means 72A, 72B for lifting and lowering the cassette covers 71A, 71B between a close position and an open position, and counter balance sections 73A, 73B for canceling the deadweight of the cassette covers 71A, 71B when lifting and lowering the cassette covers 71A, 71B. The counter balance sections 73A, 73B supply compressed air having a pressure for canceling the deadweight of the cassette covers 71A, 71B in a direction opposite from the direction of rotation of a second rotating shaft 72b, as the cassette covers 71A, 71B are lifted or lowered, into a rotary cylinder 73c. |
