发明名称 SUBSTRATE WITH EMBEDDED SINTERED HEAT SPREADER AND PROCESS FOR MAKING THE SAME
摘要 The present disclosure relates to a substrate with an embedded sintered heat spreader and a process for making the same. According to an exemplary process, at least one cavity is created through the substrate. Sinterable paste including metal particulates and binder material is then dispensed into the at least one cavity. Next, the sinterable paste is sintered to create a sintered heat spreader, which is characterized by high thermal conductivity. The sintered heat spreader adheres to the inside walls of the at least one cavity, enhancing the overall thermal conductivity of the substrate.
申请公布号 US2016336254(A1) 申请公布日期 2016.11.17
申请号 US201514937550 申请日期 2015.11.10
申请人 RF Micro Devices, Inc. 发明人 Railkar Tarak A.
分类号 H01L23/373;H01L21/48;H01L23/00 主分类号 H01L23/373
代理机构 代理人
主权项 1. A method comprising: providing a substrate having a top surface and a bottom surface opposite the top surface; creating at least one cavity that extends through the substrate from the top surface of the substrate to the bottom surface of the substrate; dispensing sinterable paste into the at least one cavity, wherein the sinterable paste comprises metal particulates with sub-nano-meter dimensions and binder material coating each of the metal particulates; and sintering the sinterable paste to create a sintered heat spreader in the substrate.
地址 Greensboro NC US