CHAMBER FOR DEGASSING SUBSTRATES

摘要

A heater or cooler chamber for a batch of more than one workpiece includes a heat storage block. In the block a multitude of pockets are provided, whereby each of the pockets may be closed or opened by a controllably operated door. A heater or cooler arrangement is applied. The pockets are tailored to surround a workpiece applied therein in a non-contact closely spaced manner.

主权项

1. A heater and/or cooler chamber for a batch of more than one workpieces, comprising:
a heat storage block made of a single metal part or of more than one thermally narrowly coupled metal parts said block comprising more than one pocket in each pocket a workpiece support for a workpiece, each pocked having at least one workpiece handling opening in a surface of said block each pocket being tailored to surround a workpiece applied on its workpiece support in a noncontact, closely spaced manner; each of the at least one workpiece handling openings of said pockets being operatively connected to a door controllably freeing and obstructing the respective workpiece handling opening, a heater and/or cooler interface to said block.