Charged-Particle-Beam Device, Specimen-Image Acquisition Method, and Program Recording Medium

摘要

A charged-particle-beam device is provided with a data processing unit that removes, from a detector signal, the effect that scattering of a primary charged-particle beam before the primary charged-particle beam reaches a specimen has on the spot shape of the primary charged-particle beam. For example, when using an electron microscope to observe a specimen in a non-vacuum atmosphere, the effect that scattering of a primary charged-particle beam due to a barrier film or a gas present in a non-vacuum space has on the spot shape of the primary charged-particle beam is removed from a signal acquired by a detector. This makes it easy to obtain high-quality images.

主权项

1. A charged-particle-beam device comprising:
a charged-particle optical lens tube that is subjected to vacuuming inside; a specimen stage on which a specimen is mounted in a non-vacuum space; a detector that detects secondary charged particles obtained by irradiation of the specimen with a primary charged-particle beam emitted from the charged-particle optical lens tube; and a data processing unit that removes, from a detector signal, the effect that scattering of the primary charged-particle beam before the primary charged-particle beam reaches the specimen has on the spot shape of the primary charged-particle beam.