CHARGED PARTICLE BEAM APPARATUS AND METHOD OF CALIBRATING SAMPLE POSITION

摘要

In accordance with an embodiment, a charged particle beam apparatus includes an irradiating section, a detecting section, a range setting section, a scanning control section, a control section, and a sample position calibrating section. The range setting section sets a scanning range of a charged particle beam. The scanning control section scans the set scanning range with the charged particle beam. The control section relatively rotates the sample by each predetermined unit in association with an entering direction of the charged particle beam, detects peak values of the signal from the detecting section when the scanning range is scanned by each rotating angle with the charged particle beam, specifies the rotating angle corresponding to the maximum peak value among the peak values of the respective detected rotating angles, and specifies a reference position to observe the sample on the basis of the specified rotating angle.

主权项

1. A charged particle beam apparatus comprising:
an irradiating section configured to irradiate a sample with a charged particle beam; a detecting section configured to output a signal corresponding to charged particles generated from the sample; a range setting section configured to set a scanning range of the charged particle beam; a scanning control section configured to scan the set scanning range with the charged particle beam; a control section which relatively rotates the sample by each predetermined unit in association with an entering direction of the charged particle beam, detects a peak value of the signal from the detecting section when the scanning range is scanned by each rotating angle with the charged particle beam, specifies the rotating angle corresponding to the maximum peak value among the peak values of the respective detected rotating angles, and specifies a reference position to observe the sample on the basis of the specified rotating angle; and a sample position calibrating section configured to relatively rotate the sample in association with the entering direction of the charged particle beam until the reference position is reached.