Image sensor

摘要

An image sensor includes a substrate with a unit pixel defined by a first separation pattern, a photoelectric conversion part in the substrate, a photocharge storage in the substrate, the photocharge storage being adjacent to the photoelectric conversion part, a second separation pattern between the photoelectric conversion part and the photocharge storage, a shielding part on a bottom surface of the substrate to cover the photocharge storage, the shielding part including a first protrusion extending into the substrate and toward the first separation pattern, and an extension extending from the first protrusion to cover the bottom surface of the substrate; and an anti-reflection layer between the shielding part and the substrate, the anti-reflection layer having an overhang structure between the first protrusion and the extension.

主权项

1. An image sensor, comprising:
a substrate with a unit pixel defined by a first separation pattern; a photoelectric conversion part in the substrate; a photocharge storage in the substrate, the photocharge storage being adjacent to the photoelectric conversion part; a second separation pattern between the photoelectric conversion part and the photocharge storage; a shielding part on a bottom surface of the substrate to cover the photocharge storage, the shielding part including:
a first protrusion extending into the substrate and toward the first separation pattern, andan extension extending from the first protrusion to cover the bottom surface of the substrate; and an anti-reflection layer between the shielding part and the substrate, the anti-reflection layer having an overhang structure between the first protrusion and the extension.