IMMERSION FIELD GUIDED EXPOSURE AND POST-EXPOSURE BAKE PROCESS

摘要

Methods disclosed herein provide apparatus and method for applying an electric field and/or a magnetic field to a photoresist layer without air gap intervention during photolithography processes. In one embodiment, an apparatus includes a processing chamber comprising a substrate support having a substrate supporting surface, a heat source embedded in the substrate support configured to heat a substrate positioned on the substrate supporting surface, an electrode assembly configured to generate an electric field in a direction substantially perpendicular to the substrate supporting surface, wherein the electrode assembly is positioned opposite the substrate supporting surface having a downward surface facing the substrate supporting surface, wherein the electrode assembly is spaced apart from substrate support defining a processing volume between the electrode assembly and the substrate supporting surface, and a confinement ring disposed on an edge of the substrate support or the electrode assembly configured to retain an intermediate medium.

主权项

1. An apparatus for processing a substrate, the apparatus comprising:
a processing chamber, the processing chamber comprising:
a substrate support having a substrate supporting surface;a heat source embedded in the substrate support configured to heat a substrate positioned on the substrate supporting surface;an electrode assembly configured to generate an electric field in a direction substantially perpendicular to the substrate supporting surface, wherein the electrode assembly is positioned opposite the substrate supporting surface having a downward surface facing the substrate supporting surface, wherein the electrode assembly is spaced apart from substrate support defining a processing volume between the electrode assembly and the substrate supporting surface; and a confinement ring disposed on an edge of the substrate support or the electrode assembly configured to retain an intermediate medium.