| 摘要 |
PURPOSE: To enhance a laser output by a method wherein a distance between a short- circuit plate and radiator is half larger than wavelength of microwaves, and a distance between an ignition auxiliary jig and the short-circuit plate is placed in a range that an electric field of microwaves in which the ignition auxiliary jig is reflected by the short-circuit plate is high, and also ignition of glow discharge is always performed within a range of the ignition auxiliary jig. CONSTITUTION: A waveguide 1 comprises a portion 2 extending substantially straight and two end part pieces 3, 4 extending at a certain angle with respect to this portion, and an end surface 11 of the end part pieces is formed with a short-circuit plate 6, and a radiator 5 for supplying microwaves is fitted on an end surface 12. The distance between the short-circuit plate and the radiator is larger than half the wavelength of microwaves, and near end surface 11, an ignition auxiliary jig 21 is disposed in a portion extending straight, and a distance between the ignition auxiliary jig and the short-circuit plate is placed in a range that an electric field of microwaves is high, and also ignition of glow discharge is always performed within a range of the ignition auxiliary jig. Thus, a substantially uniform electric field distribution and improved heat dissipation can be obtained. |
