| 摘要 |
PURPOSE:To allow formation of a driving electrode with high positional accuracy on a piezoelectric. CONSTITUTION:A piezoelectric ceramic 5 is sandwiched by metallic masks 1, 2 each applied with an electrode pattern such that the driving electrodes on the opposite sides are not subjected to positional shift and then the piezoelectric ceramic 5 is set on a fixing base 6. Resistor heating type deposition sources 3, 4 are constituted of heaters 3a, 4a and crucibles 3b, 4b. An electrode material, e.g. a nickel alloy, is placed in the crucibles 3b, 4b and when power is fed simultaneously to the heaters 3a, 4a, the metal in the crucibles 3b, 4b is fused and evaporates in the form of metal particles which eventually arrive at the piezoelectric ceramic 5 thus forming the driving electrodes simultaneously on the opposite sides of the piezoelectric. |
