DRY ETCHING METHOD FOR THIN FILM,申请号JP19930241730-传众专利搜索

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发明名称	DRY ETCHING METHOD FOR THIN FILM
摘要
申请公布号	JPH0799180(A)	申请公布日期	1995.04.11
申请号	JP19930241730	申请日期	1993.09.28
申请人	SEIKO EPSON CORP	发明人	OIKE KAZUO
分类号	H01L29/40;H01L21/302;H01L21/3065;H01L21/336;H01L29/78;H01L29/786;(IPC1-7):H01L21/306	主分类号	H01L29/40
代理机构		代理人
主权项
地址

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