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发明名称
EVACUATING SYSTEM SWITCHING DEVICE AND EVACUATING APPARATUS
摘要
申请公布号
JPH10324972(A)
申请公布日期
1998.12.08
申请号
JP19970134836
申请日期
1997.05.26
申请人
KOKUSAI ELECTRIC CO LTD
发明人
MUKODA JINICHIRO
分类号
C23C16/44;C23C16/455;H01L21/205;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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