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发明名称
OPTICAL DISPLACEMENT MEASURING DEVICE
摘要
申请公布号
JPH11201751(A)
申请公布日期
1999.07.30
申请号
JP19980004752
申请日期
1998.01.13
申请人
NIKON CORP
发明人
IWASAKI YUTAKA
分类号
G01B11/00;G01C3/06;(IPC1-7):G01C3/06
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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