| 摘要 |
The present invention pertains to the field of quantum electronics and may be used in the production of periodic-pulse lasers based on KrF, ArF, HF and DF. This device can be used for creating a laser having a maximal compactness and a high reliability while substantially increasing the volume and improving the energetic characteristics of said laser. This invention is essentially characterised in that the laser pumping sources (18, 19) are arranged in two chambers defined by two cylindrical dielectric envelopes (3, 4) having two electrodes (9, 10) arranged between them, said electrodes being partially permissive to the gas flow. The pumping system (12) generates two branches (14, 15) of a flow of an active gaseous medium, each following its own cylindrical dielectric envelope (3, 4) and having a speed orientation (16) in the discharge interval (11) which is perpendicular to the working surfaces (17) of the electrodes (9, 10). The electrodes (9, 10) consist of plates (20) having members (21) made of a dielectric or a metal arranged between them. Each of the two pumping sources (18, 19) comprises two portions (22, 23) which have different polarities and include common points (24). The first electrode (9) is electrically connected to the first portions (22) of the pumping sources (18, 19), while the second electrode (10) is connected to the second portions (23).
|
