摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for fluorescent X-ray analysis which can precisely obtain the abundance of an object to be measured. SOLUTION: Illumination directionsϕa,ϕb are determined so that the value, which is obtained by multiplying a fluorescent X-ray intensity Ia2 of a standard sample 2 by PF1/PF2, which is the ratio of the granularity coefficient of a standard sample 1 to that of the standard sample 2, approaches a fluorescent X-ray intensity Ia1 of the standard sample 1. The abundance of the object to be measured is determined from the fluorescent X-ray intensities Ia3, Ib3 for the sample to be measured at the determined illumination directionsϕa,ϕb, to precisely determine the abundance of the object to be measured in the sample to be measured. COPYRIGHT: (C)2005,JPO&NCIPI
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