| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet recording head capable of performing high-quality printing with an inexpensive process under low temperatures, which keeps an etching sacrifice layer taper-angled to drastically lower the cracking probability in an etching stop layer during the formation of an ink supply port using anisotropic etching, with an improved yield. SOLUTION: The sacrifice layer 102 used for the anisotropic etching is moderately tapered to release stress concentration at the shoulder part of a thin film sacrifice layer of the etching stop layer 103 deposited thereupon, thereby lowering the generation probability of membrane cracking. COPYRIGHT: (C)2007,JPO&INPIT
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