| 摘要 |
PROBLEM TO BE SOLVED: To provide a blasting method which can surely remove a deposit without damaging the surface of a material to be treated. SOLUTION: The blasting method sprays a blast material 19 on the surface 3a of a ceramic heater formed of aluminum nitride, so as to remove the deposit adhered on this surface 3a. Abrasive particles comprising silicon carbide or aluminum oxide, and having the grain size of #400-#800 are used as the blast material 19, and the blast pressure which is the pressure when the blast material 19 hits on the surface 3a of the ceramic heater is set at 40-150 gf/cm<SP>2</SP>. COPYRIGHT: (C)2007,JPO&INPIT
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