| 摘要 |
A process for preparing a semiconductor substrate for biological analysis in an integrated device, the biological analysis comprising the steps of amplifying DNA and detecting amplified DNA in the same chamber, comprises the steps of a) forming a silicon dioxide surface on said semiconductor substrate b) treating said silicon dioxide surface with a silane; c) forming a silanized surface; d) grafting nucleic acid probes; e) treating said silanized surface with a deactivating agent and f) forming a deactivated substrate sequentially. Further the process can include the step of cleaning the silicon dioxide substrate before the step of treating said silicon dioxide surface with a silane and the step of reacting the terminal group of the silane with a cross-linker or alternatively the step of reacting the derivatized nucleic acid probes with a cross-linker, before the grafting step. |
