| 摘要 |
PROBLEM TO BE SOLVED: To provide a circularity measuring apparatus allowing downsizing.SOLUTION: A circularity measuring apparatus 1 of the present invention includes: a mounting table 12 on which a workpiece W is placed and is rotatable about a rotation axis; a carriage 16 movable along the direction parallel to the rotation axis; a revolving arm (first arm) 18 that is supported by the carriage 16 and extends in the radial direction of the rotation axis; a radially moving arm (second arm) 20 that is supported at the tip of the revolving arm 18 movably in the radial direction and extends radially; and a detector holder 22 that is fixed to the tip of the radially moving arm 20 and holds the detector 24.SELECTED DRAWING: Figure 1 |
