| 摘要 |
PROBLEM TO BE SOLVED: To provide system level power delivery to a plasma processing load.SOLUTION: The present disclosure discusses a power delivery system, and a method of operation, configured to monitor characteristics of a generator, a match network, and a plasma load, via one or more sensors, and control these components via a local controller in order to improve power delivery accuracy and consistency to the plasma load. Control can be based on a unified monitoring of power characteristics in the power delivery system and variations between the components and even non-electrical characteristics such as plasma density, an end point, and spectral components of plasma light emission, to name a few.SELECTED DRAWING: Figure 2A |
