| 发明名称 | Pressure sensor | ||
| 摘要 | According to one embodiment, a pressure sensor includes: a support section; a film section; and a strain sensing element. The film section is supported by the support section and deformable. The film section includes a first film and a second film. The first film includes a first region located in a central part and a second region located in a peripheral part around the first region. The second film is provided on the first region. The strain sensing element is provided on part of the second region. The strain sensing element includes a first magnetic layer; a second magnetic layer; and an intermediate layer. Magnetization of the first magnetic layer changes in response to deformation of the second region. The intermediate layer is provided between the first magnetic layer and the second magnetic layer. | ||
| 申请公布号 | US9422150(B2) | 申请公布日期 | 2016.08.23 |
| 申请号 | US201414584625 | 申请日期 | 2014.12.29 |
| 申请人 | Kabushiki Kaisha Toshiba | 发明人 | Okamoto Kazuaki;Fukuzawa Hideaki;Fuji Yoshihiko;Yuzawa Akiko;Hori Akio;Masunishi Kei |
| 分类号 | B81B3/00;H01L41/12;G01L1/12;G01L9/16;G01L17/00 | 主分类号 | B81B3/00 |
| 代理机构 | Oblon, McClelland, Maier & Neustadt, L.L.P. | 代理人 | Oblon, McClelland, Maier & Neustadt, L.L.P. |
| 主权项 | 1. A pressure sensor comprising: a support section; a film section supported by the support section, being deformable, and including a first film and a second film, the first film including a first region located in a central part and a second region located in a peripheral part around the first region, and the second film being provided on the first region; and a strain sensing element provided on part of the second region and including: a first magnetic layer with a magnetization changing in response to deformation of the second region;a second magnetic layer; andan intermediate layer provided between the first magnetic layer and the second magnetic layer. | ||
| 地址 | Minato-ku JP | ||