Detection system and method for automatically adjusting gray scale

摘要

A detection system and a method capable of automatically adjusting a gray scale are provided. The detection system includes a detection lens (1), wherein the detection lens (1) is configured to collect a mask alignment image (10) and a substrate alignment image (11) formed by images of a mask alignment mark (8) on a mask (6) and a substrate alignment mark (9) on the glass substrate (7); and an automatic filter device (4) provided in a light path in which the detection lens (1) forms the substrate alignment image (11), wherein the automatic filter device (4) comprises an automatic gray scale detection module (12), a control module (14) and a filter (13). The detection system and method capable of automatically adjusting a gray scale can automatically change the gray scale of the substrate alignment image (11), thereby to improve the automatization degree of the detection system.

主权项

1. A detection system capable of automatically adjusting a gray scale, comprising:
a detection lens, wherein the detection lens is configured to collect a mask alignment image and a substrate alignment image respectively formed by images of a mask alignment mark on a mask and a substrate alignment mark on the glass substrate; and an automatic filter device provided in a light path in which the detection lens forms the substrate alignment image, wherein the automatic filter device comprises an automatic gray scale detection module, a control module and a filter, wherein the automatic gray scale detection module is configured to detect a gray scale of the substrate alignment image formed by the detection lens, the control module is configured to add or remove the filter according to the gray scale of the substrate alignment image detected by the automatic gray scale detection module, and the filter is configured to filter out a portion of light in the optical path to reduce the gray scale of the substrate alignment image.