| 摘要 |
PURPOSE:To separate a defective element or a part of circuit as necessary by a method wherein a plurality of functional integrated circuits are laminated on an integrated circuit on a substrate in the three-dimensionally integrated circuit, means for transmitting signals are formed among each layer, the operation of the circuit is detected by at least one layer and a defective position is memorized. CONSTITUTION:An inverter circuit consisting of N-MOSs T1, T2 is formed on the Si substrate. The inverter circuit is coated with the first layer insulating isolation film 20, and an MOS T3 and a light emitting diode D1 are shaped through an Si crystalline film 21 and a GaAlAs crystalline film 24. An N-MOS T4, a P-MOS T5 and a photo diode D2 are formed similarly in the Nth layer element region, and the D2 is optically coupled with the D1 through ZnS. In the inspection (diagnosis) of the operation of the circuit, the functions of each circuit block are inspected in predetermined order, an ROM circuit memorizing the results of inspection is shaped to a self-dianostic circuit block, and each layer is coupled by electro optical signals. |
