发明名称 Surface elastic wave element
摘要 A surface elastic wave element comprising a (110)-oriented silicon substrate, a zinc oxide layer formed on the silicon substrate and electrodes formed on the zinc oxide layer so as to propagate surface elastic wave to the [001]-axis direction of the zinc oxide layer.
申请公布号 US4449107(A) 申请公布日期 1984.05.15
申请号 US19820354430 申请日期 1982.03.03
申请人 CLARION CO., LTD. 发明人 ASAI, RYUICHI;OKAMOTO, TAKESHI;MINAGAWA, SHOICHI
分类号 H03H9/145;H01L41/08;H03H3/08;H03H9/02;H03H9/25;H03H9/64;(IPC1-7):H03H9/14;H03H9/42 主分类号 H03H9/145
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