Inspection apparatus and method for display device

摘要

The inspection apparatus of the invention inspects a display device including first and second bus lines formed on an active matrix substrate. The inspection apparatus includes a first substrate unit and a second substrate unit each having a pair of substrates and connecting films therebetween. On one substrate of each substrate unit, inspection terminals and first inspection lines are formed and each of the inspection lines are connected to one of the inspection terminals. On the other substrate of each substrate unit, second inspection lines are provided. The first and second inspection lines of the substrates are selectively connected by the connecting films. During inspection, the second inspection lines of the first substrate unit are brought directly in contact with the first bus lines, so that each of the first bus lines is connected to one of the inspection terminals of the first substrate unit. Each of the second bus lines is connected to one of the inspection terminals of the second substrate unit via the respective second inspection lines in the same way. The apparatus further includes: a driving signal input circuit for supplying driving signals for a display inspection of the display device to the inspection terminals of each substrate unit; a resistance measuring device for measuring resistances of the first and second bus lines of the display device; and a section for connecting either of the driving signal input circuit or the resistance measuring device to the first and second substrate unit.