TREATMENT OF TETRAALKYL AMMONIUM HYDROXIDE-CONTAINING WASTE WATER AND DEVELOPER FOR ELECTRONIC PARTS

摘要

PURPOSE:To provide a method for recovering tetraalkyl ammonium hydroxide by efficiently treating a waste water containing tetraalkyl ammonium hydroxide and a photoresist. CONSTITUTION:Tetraalkyl ammonium hydroxide is condensed and separated by electrodialyzing the waste water containing tetraalkyl ammonium hydroxide and the photoresist.