Hydrogenation of photoresponsive semiconductor devices

摘要

Hydrogenation of an optical device that includes an intrinsic region (24) and at least one associated doped region (18,30) is effective to improve the photoresponsivity of the device. Subsequent annealing of the device substantially restores the conductivity of the doped region(s) while preserving in the intrinsic region a major part of the beneficial effects of hydrogenation.