ELECTRONIC DEVICES INCLUDING ELECTRODES COMPRISING CHROMIUM NITRIDE AND A METHOD OF MANUFACTURING SUCH DEVICES

摘要

A thin-film circuit element such as a top-gate TFT has good quality electrical contacts formed between an electrode (151, 152, 155) of chromium nitride and the semiconductor film (50) of the circuit element and/or another conductive film such as a connection track (37, 39, 40) of, for example, aluminium. Chromium nitride has a particularly advantageous combination of properties for use as an electrode material, including, for example, low affinity for oxide growth even during deposition thereon of semiconductor, insulating and/or metal films, a doping potential to enhance ohmic contact to semiconductors, a barrier function against potential impurities, good thin-film processing compatibility, and hillock prevention in an underlying aluminium conductor.