| 摘要 |
PROBLEM TO BE SOLVED: To reduce generation of micro bubbles, by installing a chemical liquid vessel storing developer, and a pressure reducing means which is linked with the vessel and reduces the pressure in the vessel. SOLUTION: A chemical liquid vessel 11 having a specified volume, e.g. 2×10<3> -1×10<4> cm<3> is installed in a developer spouting equipment 10. A developer supplying pipe 12, a developer spouting pipe 13, a gas supply pipe 16, a drain pipe 15 and a forced exhaust pipe 16 are linked with the chemical liquid vessel 11. Corresponding to the developer supply pipe 12, the gas supply pipe 14, the drain pipe 15 and the forced exhaust pipe 16, valves 12a, 14a, 15a and 16a are installed, respectively. The developer spouting pipe 13 is equipped with a pump 17. The chemical liquid vessel 11 is equipped with a recognizer 18 recognizing the height of developer surface in the chemical liquid vessel 11. A pressure gauge 19 indicating the pressure in the chemical liquid vessel 11 is linked with the vessel. The height of the liquid surface of the developer supplied to the chemical liquid vessel 11 is adjusted in a specified range, i.e., between the liquid surface lower limit L11 and the liquid surface upper limit H11, by using the recognizer 18. |
