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发明名称
METHOD OF MANUFACTURING SEMICONDUCTOR MEMORY DEVICE USING CELL PLUG ION INJECTION
摘要
申请公布号
KR0161474(B1)
申请公布日期
1999.02.01
申请号
KR19950050683
申请日期
1995.12.15
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
SEO, YONG-WOO;KANG, DUK-DONG;HONG, SOON-CHUL;HONG, WON-CHUL
分类号
H01L21/265;H01L21/8242;H01L27/108;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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