发明名称 POLISHING DEVICE AND POLISHING METHOD
摘要 PROBLEM TO BE SOLVED: To prevent a tool mark from being easily generated, in a polishing process. SOLUTION: A polishing auxiliary tool 20 is previously prepared, which has an inverted surface 21 reproducing almost inverted shape of a polishing surface 11 of an optical element 10 which is a work piece. The polishing auxiliary tool 20 is pressed to the optical element 10 so as to oppose its inverted surface 21 to the polishing surface 11 of the optical element 10. Next a polishing belt 60 is arranged, between the polishing surface 11 of the optical element 10 and the inverted surface 21 of the polishing auxiliary tool 20, so as to traverse the polishing surface 11 through on a center axis of the optical element 10. Then, while rotating the optical element 10, the polishing belt 60 is moved in its lengthwise direction, and the polishing surface 11 of the optical element 10 is polished.
申请公布号 JPH1142545(A) 申请公布日期 1999.02.16
申请号 JP19970201294 申请日期 1997.07.28
申请人 NIKON CORP 发明人 SHINADA KUNINORI
分类号 B24B13/02;B24B21/16;(IPC1-7):B24B13/02 主分类号 B24B13/02
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