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发明名称
Einrichtung zur Bildung einer Dünnschicht aus Oxydverbundsupraleiter
摘要
申请公布号
DE69132079(D1)
申请公布日期
2000.05.04
申请号
DE19916032079
申请日期
1991.08.01
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
NAKANISHI, HIDENORI;TANAKA, SABURO;ITOZAKI, HIDEO;YAZU, SHUJI
分类号
C01B13/14;C01G1/00;C23C14/28;C30B29/22;H01L39/24;(IPC1-7):H01L39/24
主分类号
C01B13/14
代理机构
代理人
主权项
地址
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