ESD PROTECT CIRCUIT OF THUN FLIM TYPE ACTUATED MIRROR ARRAYS MODULE

摘要

PURPOSE: An ESD(Electrostatic Diode) protection circuit of an actuated mirror arrays module is to improve the connection probability and reduce the short-circuit of a main pad and an outside pad by increasing the contact area of the main pad and the outside pad. CONSTITUTION: A main pad(10) is formed of a material having the good electric conductivity. One side of the main pad is electrically connected to a main cell so that a picture signal supplied from the outside is transmitted to actuators having a row or column direction. Another side of the main pad is connected to a resistor(20). An outside pad(30) is formed of a material having the good electric conductivity. The outside pad is formed to the outside of a thin film actuated mirror arrays module to receive the picture signal from the outside. The resistor is formed of polysilicon. One side of the resistor is electrically connected to the main pad, and another side thereof is electrically connected to the outside pad. A main connecting part(15) is electrically connected to the main pad and the resistor.