摘要 |
PROBLEM TO BE SOLVED: To prevent such a trouble from occurring that the hole provided to the inner cylinder wall of a diffusion barrier is perfectly closed by a solid electrolyte material at a time of the formation of a gas inflow hole. SOLUTION: In a sensor element wherein inner and outer electrode are arranged on a solid electrolyte and the inner electrode is provided in the diffusion channel demarcated by a diffusion barrier and a gas inflow hole passes through a solid electrolyte sheet in the direction substantially vertical to the surface of the solid electrolyte sheet to communicate with the diffusion channel, the diffusion barrier 31 is arranged in the diffusion channel 30 at a place retreating from the inner wall of the gas inflow hole 25. |