| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a secondary electron measuring device, in which a secondary electron emitting coefficient of an insulating material is measured within a range where the insulating material never undergoes dielectric breakdown. SOLUTION: A secondary electron measuring device comprises: an ion gun 1 for applying an accelerating voltage so as to irradiate an ion according to an ion current; a target 3 arranged thereon an object to be measured to be irradiated with the ion by the ion gun 1; a target ammeter 3a for measuring a current flowing in the target 3; a collector for catching an electron emitted from the object to be measured; a collector ammeter 5a for measuring a current flowing in the collector 5; and a controller for controlling an ion irradiating time by the ion gun 1 to be equal to or smaller thanεε0SV/ti (whereinεrepresents a dielectric constant of the object to be measured;ε0, a dielectric constant in vacuum; S, an ion irradiating area; t, a thickness of the object to be measured; V, an accelerating voltage value; and I, an ion current).</p> |
