| 摘要 |
An apparatus for transferring a wafer is provided to prevent a wafer tweezer from coming in contact with other wafers by checking the placement of a wafer tweezer guide between slots when a wafer tweezer is positioned between the slots. A wafer tweezer(110) includes a body part(113) of a predetermined shape. A wafer absorption plate capable of absorbing a wafer is installed in a side of the body part. A wafer tweezer guide(300) is connected to the body part of the wafer tweezer wherein the wafer tweezer guide and the body part are formed as one body, having such a width to be placed in a slot formed in a wafer cassette.
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