发明名称 |
SEMICONDUCTOR DEVICE, TELEVISION SET, AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
<p>An object of the invention is to provide a method for manufacturing a substrate having a film pattern such as an insulating film, a semiconductor film, or a conductive film with an easy process, and further, a semiconductor device and a television set having a high throughput or a high yield at low cost and a manufacturing method thereof. One feature of the invention is that a first film pattern is formed by a droplet discharge method, a photosensitive material is discharged or applied to the first film pattern, a mask pattern is formed by irradiating a region where the first film pattern and the photosensitive material are overlapped with a laser beam and by developing, and a second film pattern having a desired shape is formed by etching the first film pattern using the mask pattern as a mask.</p> |
申请公布号 |
WO2005071756(A1) |
申请公布日期 |
2005.08.04 |
申请号 |
WO2005JP01280 |
申请日期 |
2005.01.24 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.;YAMAZAKI, SHUNPEI;SHOJI, HIRONOBU;ARAI, YASUYUKI |
发明人 |
YAMAZAKI, SHUNPEI;SHOJI, HIRONOBU |
分类号 |
G02F1/1362;H01L21/336;H01L21/77;H01L21/84;H01L29/417;(IPC1-7):H01L29/786 |
主分类号 |
G02F1/1362 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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