| 摘要 |
A terpolymer of a hydrophobic polymer, for example, methyl methacrylate, a hydrophilic polymer, for example, poly(ethylene glycol) methacrylate, and a polymer having a sidegroup that is photocleavable to produce a carboxyl side chain, for example, o-nitrobenzyl methacrylate, is employed as a photoresist. |
