ULTRASONIC MOTOR CONTROL METHOD, ULTRASONIC MOTOR CONTROL DEVICE, AND PROGRAM FOR CONTROLLING ULTRASONIC MOTOR

摘要

[PROBLEMS] To realize a highly accurate control in a stationary response with simple configuration by compensating the nonlinearity and dynamic characteristic change of an ultrasonic motor. [MEANS FOR SOLVING PROBLEMS] A virtual model type IMC-PID control circuit (11) includes a built-in model control system as a variable virtual model having a transmission function reflecting a change of the dynamic characteristic change of the ultrasonic motor obtained by using the identification method. As for learning of a neural network (12), a genetic algorithm based on a genetic algorithm circuit (13) is employed. It is possible to use one of the output of the virtual model type IMC-PID control circuit (11) and the output of the neural network (12) employing the genetic algorithm or both of them by adding the output of the neural network (12) to the addition point of the output of the virtual model type IMP-PID control circuit (11).