Exposure system for substrate bodies, has exposure device with guiding cross member for one guiding carriage carrying optics unit, where guiding carriage is guided movably in one direction on guiding cross member

摘要

The exposure system has an exposure device (20) with a guiding cross member (30) for guiding carriage (72,74) carrying the optics unit (22). The guiding carriage is guided movably in one direction (X) on the guiding cross member, which is arranged movably in the direction of the other direction (Y) on the machine frame (10).