发明名称 |
Substrate holding apparatus |
摘要 |
The present relates to a holding apparatus for holding a substrate to be polished and pressing the substrate against a polishing surface. The substrate holding apparatus comprises a top ring body (2) for holding a substrate (W), an elastic pad brought into contact with the substrate, and a support member (6) for supporting the elastic pad. The substrate holding apparatus further comprises a contact member (8,9) mounted on a lower surface of the support member (6) and disposed in a space formed by the elastic pad and the support member (6). The contact member (8,9) has an elastic membrane (4) brought into contact with the elastic pad. A first pressure chamber (24,25) is defined in the contact member (8,9), and a second pressure chamber (22,23) is defined outside of the contact member. The substrate holding apparatus further comprises a fluid source (120) for independently supplying a fluid into or creating a vacuum in the first pressure chamber and the second pressure chamber. |
申请公布号 |
EP1944123(A2) |
申请公布日期 |
2008.07.16 |
申请号 |
EP20080007317 |
申请日期 |
2001.10.11 |
申请人 |
EBARA CORPORATION |
发明人 |
TETSUJI, TOGAWA;IKUTARO, NOJI;KEISUKE, NAMIKI;HOZUMI, YASUDA;SHUNICHIRO, KOJIMA;KUNIHIRO, SAKURAI;NOBUYUKI, TAKADA;OSAMU, NABEYA;MAKOTO, FUKISHIMA;HIDEKI, TAKAYANAGI |
分类号 |
B24B37/005;B24B37/04;B24B37/30;B24B41/06;H01L21/304 |
主分类号 |
B24B37/005 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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