LITHOGRAPHIC APPARATUS WITH ROTATION FILTER DEVICE

摘要

A lithographic apparatus (1) including a filter device (149) is disclosed. The filter device (149) has a plurality of foils (200) attached to a holder (201) which is able to rotate around a rotation axis (RA). The foils (200) are arranged substantially parallel to the rotation axis (RA). The foils (200) comprise a uni-directional carbon- fiber composite material selected from the group consisting of carbon-carbon composite (C-C composite) and carbon-silicon carbide composite (C-SiC composite). During operation, the filter device (149) rotates and filters out debris from a radiation source (SO), such as a Sn plasma source. Such a filter device (149) per se may be provided.