Mask and method of fabricating spacers

摘要

A mask and a method of fabricating spacers (2) using the mask (1). The mask (1) comprises a light transmitting region including an array of light transmitting holes (230), a light non-transmitting region and a phase shifting layer (240) formed in one of two adjacent light transmitting holes (230) of the mask for shifting phrase of lights passing through the light transmitting holes (230). Thus, a light intensity can be reduced or lowered to zero when the lights pass through a diffractive region of the two adjacent light transmitting holes (230). Therefore, a bridging effect between two adjacent spacers (2) is alleviated and even avoided during fabricating the spacers (2).

主权项

1. A method of fabricating spacers, comprising:
forming a spacer material film on a substrate; irradiating the spacer material film in a region where a spacer array is to be formed, by using a mask, so that the spacer material film in the region is cured to form a pattern of the spacer array, the mask comprising a light transmitting region including an array of light transmitting holes corresponding to the region of the spacer array, a light non-transmitting region; and a phase shifting layer formed in one of two adjacent light transmitting holes of the mask for shifting phrase of lights passing through the light transmitting hole; and removing the uncured spacer material.