Printed chemical mechanical polishing pad having abrasives therein

摘要

A method of fabricating a polishing layer of a polishing pad includes determining a desired distribution of particles to be embedded within a polymer matrix of the polishing layer. A plurality of layers of the polymer matrix is successively deposited with a 3D printer, each layer of the plurality of layers of polymer matrix being deposited by ejecting a polymer matrix precursor from a nozzle. A plurality of layers of the particles is successively deposited according to the desired distribution with the 3D printer. The polymer matrix precursor is solidified into a polymer matrix having the particles embedded in the desired distribution.

主权项

1. A method of fabricating a polishing layer of a polishing pad, comprising:
receiving a computer-readable file containing data setting a desired distribution of particles to be embedded within a polymer matrix of the polishing layer; successively depositing a plurality of layers of the polymer matrix with a 3D printer, the polymer matrix of each layer of the plurality of layers being deposited by ejecting a polymer matrix precursor from a nozzle of the 3D printer; dispensing the particles from the 3D printer; controlling the 3D printer in response to the data setting the desired distribution of particles so that successively depositing the plurality of layers includes distributing the particles in the plurality of layers according to the desired distribution with the 3D printer; solidifying the polymer matrix precursor to form a solidified polymer matrix having the particles embedded in the desired distribution.