| 摘要 |
Two types of high-purity Ti complexes, [TiO(DPM: dipivaloylmethane)2]2 and cis-Ti(O-t-Bu)2(DPM)2, and BST film-forming liquid compositions comprising solutions of either of the two types of high-purity Ti complexes and Ba(DPM)2 and/or Sr(DPM)2 in organic solvents can be used to form BST films. Crystals of the former complex are produced by adding purified water to a solution of TiCl2(DPM)2 in an organic solution, adding an alkali chemical to the solution to adjust the pH to 6.0-8.0 to thereby produce turbidity, and separating the organic layer which is then washed with water and heated to reflux. Crystals of the latter complex is produced by adding HDPM to a solution of Ti(O-t-Bu)4 in an organic solvent, and heating the solution to reflux.
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