Method and apparatus for sealing an opening of a processing chamber

摘要

A method and apparatus for sealing an opening of a processing chamber are provided. In one embodiment, the invention generally provides a closure member integrated within a wall of a process chamber for sealing an opening within the wall of the chamber. In another embodiment, the invention provides a closure member configured to seal an opening in the wall of a processing chamber from the inside of the chamber.

主权项

1. A processing chamber, comprising:
a chamber body having a bottom, a first wall, and a second wall, the second wall having a rear plate and a front plate, wherein facing surfaces of the rear plate and the front plate define an enclosure therebetween, wherein facing surfaces of the first wall and the front plate define a processing volume therebetween, wherein the processing volume extends to the surface of the front plate facing the rear plate, the front plate having a first opening defined between the surface of the front plate facing the rear plate and the surface facing the first wall, the opening connecting the enclosure to the processing volume, a second opening extending through the rear plate from the enclosure, wherein the first and second opening form a substrate transfer opening through the second wall, and wherein a closure member is integrated into the chamber body and disposed in the enclosure between the front plate and the rear plate of the second wall, and wherein the closure member is configured to contact the surface of the front plate facing the rear plate and seal the first opening to isolate the enclosure from the processing volume; and a deployment mechanism configured to move the closure member with respect to the first opening.