FinFET devices with multiple channel lengths

摘要

A method including patterning a continuous fin having a first segment and a second segment in a semiconductor layer, the first segment is arranged at an angle relative to the second line segment, and forming a first gate and a second gate substantially parallel to each other, the first gate substantially covering sides and a top of a portion of the first segment of the continuous fin, the second gate substantially covering sides and a top of a portion of the second segment of the continuous fin.

主权项

1. A method comprising:
forming a first pattern in a first hardmask layer above a mandrel layer, the first pattern comprising a set of parallel lines; forming a second pattern in a fill layer above the mandrel layer, the second pattern comprising a second set of parallel lines, at least one end of one of the parallel lines of the first pattern is in direct contact with at least one end of one of the parallel lines of the second pattern; forming a mandrel by transferring the first and second patterns from the first hardmask layer into the mandrel layer is directly above a second hardmask layer; forming a set of sidewall spacers above the second hardmask layer along opposite sidewalls of the mandrel, the second hardmask layer being on top of a substrate; removing the mandrel selective to the set of sidewall spacers and the second hardmask layer; forming a continuous fin by transferring a fin pattern defined by the set of sidewall spacers into the substrate, the continuous fin having a first segment and a second segment in the substrate, the first segment is arranged at an angle relative to the second segment, wherein the angle between the first segment of the continuous fin and the second segment of the continuous fin is greater than 90 degrees; and forming a first gate and a second gate substantially parallel to each other, the first gate substantially covering sides and a top of a portion of the first segment of the continuous fin, the second gate substantially covering sides and a top of a portion of the second segment of the continuous fin.