Magnetic sensors with permanent magnets magnetized in different directions

摘要

A method and system for a device with a magnetic sensor includes a first permanent magnet and a second permanent magnet. The first permanent magnet and the second permanent magnet of the magnetic sensor have at least one alternating ferromagnetic (FM) layer and antiferromagnetic (AFM) layer. The first permanent magnet is magnetized in a first direction and the second permanent magnet is magnetized in a second direction which is substantially orthogonal to the first direction. The blocking temperature of the AFM layer of the first permanent magnet is higher than the blocking temperature of the AFM layer of the second permanent magnet.

主权项

1. A device, comprising:
a magnetic sensor including a plurality of sensing elements, a first permanent magnet and a second permanent magnet, wherein,
the first permanent magnet is deposited on a movable actuator and the second permanent magnet is deposited on another movable actuator,the first permanent magnet deposited with at least one alternating ferromagnetic (FM) layer and antiferromagnetic (AFM) layer and the second permanent magnet deposited with at least one alternating FM layer and AFM layer; andthe first permanent magnet is magnetized in a first direction and the second permanent magnet is magnetized in a second direction which is substantially orthogonal to the first direction, wherein the blocking temperature of the AFM layer of the first permanent magnet is higher than the blocking temperature of the AFM layer of the second permanent magnet; and wherein,a subset of the plurality of sensing elements including at least one electrode configured to move relative to the subset of the plurality of sensing elements, based upon a movement of the first permanent magnet deposited on the movable actuator; andanother subset of the plurality of sensing elements including at least another one electrode configured to move relative to the another subset of the plurality of sensing elements, based upon a movement of the second permanent magnet deposited on the another movable actuator.